Bionanomaterial Applications to MEMS devices.
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Bionanomaterial Applications to MEMS devices.
CIC nanoGUNE Seminars
- Speaker
-
Dr. Shinya Kumagai, Toyota Technological Institute
- When
-
2013/06/24
13:00
- Place
- Auditorium of the Centro de Fisica de Materiales, Paseo Manuel de Lardizabal 5, Donostia-San Sebastián
- Add to calendar
-
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**Host** : Alexander Bittner
Bionanomaterials have been attracting broad interest in many research fields
including Micro Electro Mechanical Systems (MEMS), because of their
unprecedented properties. The bionanomaterials are synthesized through bottom
up process. In contrast, the MEMS devices are fabricated through top down
process of bulk materials. Fusion of the bottom up and top down processing is
needed to realize intriguing devices.
First topic is selective patterning of bionanomaterials. For the device
application, the bionanomaterials should be patterned on a solid surface to
use their properties to the full. Precisely controlling the interactions
between the bionanomaterial and solid surface realizes selective single
placements of bionanomaterials.
Second topic is application of the patterned bionanomaterials. The patterned
bionanomaterials are used as catalyst to crystallize an amorphous Si film. The
obtained poly-Si film is used to make a MEMS resonator. The fabricated MEMS
resonator shows superior resonant characteristics. Q factor of the resonant
curve is increased, which indicates that actuation efficiency is increased.
Third topic is MEMS application to the biological field. A plasma nozzle
device is fabricated toward the limited plasma irradiation to a tissue. Due to
the high reactivity, plasmas are now used in not only materials processing but
also treatments of disinfection and sterilization. The plasma irradiation
limited by the nozzle enables treatments for individual cells.